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The CMA10B Mass Flow Controller (MFC) is a compact, fast response model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 15 to 14000 sccm, N2 with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale and is also available as a flow meter. Either analog (0 to 5 VDC) or digital (RS485, PROFINET® or Modbus TCP/IP) communication interfaces are available. The required power supply voltage is 24 VDC nominal.

• Ultrafast response time of <100 msec

• Control range from 0.1 to 100% of Full Scale

• Accuracy of ±0.8% of set point

• Minimal zero and span drift assure long term reproducibility

• Surface mount interface available for compact gas panel design

• Embedded web browser for setup and diagnostics

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