The IE500A mass flow controller is elastomer-sealed, multi-gas/multi-range MFC with an IP66-rated enclosure designed for use in harsh industrial environments where resistance to liquid and dust ingress are essential. The IE500A is capable of Full Scale ranges from 250 slm to 500 slm (N2 equivalent). This broad flow range is enabled by the unique control valve design, which responds rapidly to set point changes while maintaining closed conductance leak rates that are well below other high flow mass flow controllers.
Flow rates from 250 to 500 slm
Seal and valve plug option of Viton, Buna, Neoprene or EPDM
Analog, RS485, Profibus™, or DeviceNet™ I/O
Standard closed conductance leak rate of less than 1.0% of Full Scale
1 to 2 second settling time
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