Specs, features, and customization options

Specs

Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale.

Standard specs
  • Full scale ranges: 0.5 SCCM to 5,000 SLPM

  • Measurement range: 0.01% – 100% of full scale

  • Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater

  • Optional high accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater

  • Repeatability: 0.1% of reading and 0.02% of full scale

  • Response time: <10 ms

  • Operating temperature: –10°C to +60°C

  • Full scale operating pressure: 160 PSIA (11 barA)

Mass flow meter operating manual

Device features and accesories


Build and performance options

Related models

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