Specs
Devices are custom ranged from 0.5 SCCM full scale to 5,000 SLPM full scale.
Spec sheets for 0.5 SCCM full scale to 5 SCCM full scale ranges
Spec sheets for 10 SCCM full scale to 20 SLPM full scale ranges
Spec sheets for 50 SLPM full scale to 5000 SLPM full scale ranges
Full scale ranges: 0.5 SCCM to 5,000 SLPM
Measurement range: 0.01% – 100% of full scale
Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
Optional high accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
Repeatability: 0.1% of reading and 0.02% of full scale
Response time: <10 ms
Operating temperature: –10°C to +60°C
Full scale operating pressure: 160 PSIA (11 barA)
Mass flow meter operating manual
Device features and accesories
Build and performance options
Our expert team of applications engineers is available to provide additional information, discuss your application, or answer any questions you may have.