Devices are custom ranged from 10 SCCM full scale to 3,000 SLPM full scale.
Spec sheet for 10 SCCM full scale to 20 SLPM full scale ranges.
Spec sheet for 50 SLPM full scale to 3,000 SLPM full scale ranges
Full scale ranges: 10 SCCM to 3,000 SLPM
Measurement range: 0.1% – 100% of full scale
Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
Repeatability: ±0.1% of full scale
Response time: <10 ms
Operating temperature: –10°C to +60°C
Full scale operating pressure: 320 PSIA (22 barA)
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