The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 Mass-Flo® controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.
Flow ranges from 10 sccm to 20 slm
Patented sensor design provides exceptional zero stability
Fast warm-up time minimizes expensive production downtime
Compatible with earlier MKS MFC and power supply/readout modules
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