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1150C Mass-Flo® Vapor Source Mass Flow Controllers are pressure based measurement and control systems designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas using viscous flow through a choked orifice.

• Deliver source vapor without the need of a carrier gas system

• Viscous flow through a choked orifice

• Wide 30 to 150°C operating temperature range

• All-metal seal design eliminates contamination

• Precise temperature control of source material

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